A system for producing nano particles, including the atomic system, the atomic particle generation system communicated with a gas source, atomic particle generation system and atomic transport system, atomic transport system and the vacuum chamber connected to the vacuum working chamber is provided with a nano hole array mask, nano hole array mask over the edge of the optical alignment system, below nano electronic alignment system, nano hole array mask has laid the substrate material to set the template below; produce system of energy and momentum to produce atomic particle source into atomic particles, atomic particles into the vacuum chamber, support adjusting the relative movement to achieve nano hole array mask and substrate material control system, realize the function with nano mask graphics processing; the invention has high control precision, small scale, processing on substrate material damage, electrical The utility model has the advantages of small influence, relatively simple system structure, various functional materials and convenient structure.
【技术实现步骤摘要】
【技术保护点】
１．一种纳米制造系统，其特征在于，包括原子粒子产生系统（３），原子粒子产生系统（３）通过阀门（２）与气源（１）连通，原子粒子产生系统（３）与原子输运系统（４）相连通，原子输运系统（４）与真空工作室（７）相连通，真空工作室（７）内设置有放置纳米孔阵列掩模板（１６）的升降及二维图形扫描支架（１５），纳米孔阵列掩模板（１６）边缘上方为光学对准系统（８），纳米孔阵列掩模板（１６）下方为纳米级电子对准系统（１７），纳米孔阵列掩模板（１６）下方还设置有用于铺设衬底材料（１４）的衬底多维调整支架（９）。
【技术特征摘要】
还没有人留言评论。发表了对其他浏览者有用的留言会获得科技券。