机械手臂、曝光机前单元和温度控制方法技术

一种机械手臂(10)、曝光机前单元(1000)和温度控制方法。机械手臂(10)，用于曝光机前单元(1000)，曝光机前单元(1000)包括温度控制单元(200)和传送单元(100)，机械手臂(10)位于传送单元(100)内，机械手臂(10)包括：本体(12)和温度传感器(14)。本体(12)能够承托玻璃基板并将位于温度控制单元(200)内的玻璃基板传送至曝光机，温度传感器(14)设置于本体(12)上，用于监测传送单元(100)内的温度。该机械手臂(10)可使玻璃基板在传送过程中温度稳定，从而有效避免温度变化对曝光精度产生的影响。

Manipulator Arm, Front Unit of Exposure Machine and Temperature Control Method

The invention relates to a manipulator arm (10), a front unit (1000) of an exposure machine and a temperature control method. The manipulator arm (10) is used for the front unit (1000) of the exposure machine. The front unit (1000) of the exposure machine includes a temperature control unit (200) and a transmission unit (100). The manipulator arm (10) is located in the transmission unit (100). The manipulator arm (10) includes a body (12) and a temperature sensor (14). The body (12) can support the glass substrate and transmit the glass substrate located in the temperature control unit (200) to the exposure machine. The temperature sensor (14) is set on the body (12) for monitoring the temperature in the transmission unit (100). The manipulator arm (10) can stabilize the temperature of the glass substrate during transmission, thereby effectively avoiding the influence of temperature change on the exposure accuracy.

【技术实现步骤摘要】
【国外来华专利技术】PCT国内申请，说明书已公开。

【技术保护点】
PCT国内申请，权利要求书已公开。

【技术特征摘要】
【国外来华专利技术】PCT国内申请，...

【专利技术属性】
技术研发人员：黄顺宏，朱广飞，
申请(专利权)人：深圳市柔宇科技有限公司，
类型：发明
国别省市：广东,44